最近这一周,有一个科技新闻传的很厉害,说清华大学弄出了一种新的产生极深紫外光源的原理,可以突破光刻机的卡脖子技术难题,甚至还有很多人传说我国已经在雄安开始建设光刻工厂了,还有图有真相,说得有鼻子有眼。很多人来问我是不是真的,我先说答案:新的光源产生原理是真的,但那个早在2010 年就提出了,目前还处在原理验证阶段,离真正实用少说也还有 15 到 20 年的时间。而这次热炒的清华大学的论文其实也是 2021 年初就发表了,不知道为什么两年半后突然被挖坟出来热炒。至于雄安建什么光刻厂云云,那就是以讹传讹,子虚乌有了。今天刚好借着这个话题,来跟大家聊聊造一个光刻机为什么那么难,中国有没有可能完全独立自主研发出最先进的光刻机。
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